Inventor
KAWAGISHI TAKAYUKI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KAWAGISHI TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
4 patentsUS10937676B2Mar 2, 2021
Substrate processing apparatus and device management controller
KOKUSAI ELECTRIC CORP4 citations71
US11966210B2Apr 23, 2024
Substrate processing apparatus, device management controller, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11782425B2Oct 10, 2023
Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
US11237538B2Feb 1, 2022
Substrate processing apparatus, device management controller, and recording medium
KOKUSAI ELECTRIC CORP0 citations50
HITACHI INT ELECTRIC INC
2 patentsUS10860005B2Dec 8, 2020
Substrate processing apparatus and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC2 citations71
US11086304B2Aug 10, 2021
Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis
HITACHI INT ELECTRIC INC0 citations50