Inventor

YASHIKI KAYOKO

JP13 patents

⚠️ This page may combine multiple inventors who share the name “YASHIKI KAYOKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

7 patents

US11387152B1Jul 12, 2022

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP2 citations71

US10937676B2Mar 2, 2021

Substrate processing apparatus and device management controller

KOKUSAI ELECTRIC CORP4 citations71

US11996337B2May 28, 2024

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations61

US12417049B2Sep 16, 2025

Management apparatus, method of processing data, recording medium, method of manufacturing semiconductor device, and processing system

KOKUSAI ELECTRIC CORP0 citations51

US11966210B2Apr 23, 2024

Substrate processing apparatus, device management controller, and recording medium

KOKUSAI ELECTRIC CORP0 citations50

US11782425B2Oct 10, 2023

Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations50

US11237538B2Feb 1, 2022

Substrate processing apparatus, device management controller, and recording medium

KOKUSAI ELECTRIC CORP0 citations50

HITACHI INT ELECTRIC INC

4 patents

US10860005B2Dec 8, 2020

Substrate processing apparatus and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC2 citations71

US10289781B2May 14, 2019

Management apparatus, substrate processing system and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC2 citations69

US11086304B2Aug 10, 2021

Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis

HITACHI INT ELECTRIC INC0 citations50

US8719230B2May 6, 2014

Information managing method, information searching method and data displaying method

HITACHI INT ELECTRIC INC0 citations50

ASAI KAZUHIDE

2 patents

US9581996B2Feb 28, 2017

Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing process

ASAI KAZUHIDE5 citations71

US8329479B2Dec 11, 2012

Information managing method, information managing apparatus and substrate processing system

ASAI KAZUHIDE2 citations60