Inventor
FOSTER MICHAEL J
US17 patents
⚠️ This page may combine multiple inventors who share the name “FOSTER MICHAEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HONEYWELL INT INC
4 patentsUS7690254B2Apr 6, 2010
Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate
HONEYWELL INT INC18 citations79
US7280262B1Oct 9, 2007
Integrated die level isolation for a MEMS device
HONEYWELL INT INC8 citations73
US7516661B2Apr 14, 2009
Z offset MEMS device
HONEYWELL INT INC6 citations60
US7487678B2Feb 10, 2009
Z offset MEMS devices and methods
HONEYWELL INT INC2 citations60