Inventor
KOMIYA MUNEKAZU
JP7 patents
Patents
7 patentsUS10672632B2Jun 2, 2020
Transfer chamber
SINFONIA TECHNOLOGY CO LTD11 citations84
US10658217B2May 19, 2020
Transfer chamber
SINFONIA TECHNOLOGY CO LTD10 citations82
US10923372B2Feb 16, 2021
Gas injection device
SINFONIA TECHNOLOGY CO LTD3 citations71
US10586723B2Mar 10, 2020
Door opening/closing system, and load port equipped with door opening/closing system
SINFONIA TECHNOLOGY CO LTD3 citations71
US11823923B2Nov 21, 2023
Transfer chamber
SINFONIA TECHNOLOGY CO LTD0 citations61
US11424145B2Aug 23, 2022
Transfer chamber
SINFONIA TECHNOLOGY CO LTD0 citations61
US10930537B2Feb 23, 2021
Door opening/closing system, and load port equipped with door opening/closing system
SINFONIA TECHNOLOGY CO LTD0 citations61