Inventor
TANIYAMA YASUSHI
JP24 patents
⚠️ This page may combine multiple inventors who share the name “TANIYAMA YASUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SINFONIA TECHNOLOGY CO LTD
17 patentsUS10672632B2Jun 2, 2020
Transfer chamber
SINFONIA TECHNOLOGY CO LTD11 citations84
US10658217B2May 19, 2020
Transfer chamber
SINFONIA TECHNOLOGY CO LTD10 citations82
US9704727B2Jul 11, 2017
Efem
SINFONIA TECHNOLOGY CO LTD10 citations82
US10501271B2Dec 10, 2019
Load port
SINFONIA TECHNOLOGY CO LTD3 citations73
US10923372B2Feb 16, 2021
Gas injection device
SINFONIA TECHNOLOGY CO LTD3 citations71
US10586723B2Mar 10, 2020
Door opening/closing system, and load port equipped with door opening/closing system
SINFONIA TECHNOLOGY CO LTD3 citations71
US9412634B2Aug 9, 2016
Atmosphere replacement apparatus, substrate transport apparatus, substrate transport system, and EFEM
SINFONIA TECHNOLOGY CO LTD3 citations68
US11823934B2Nov 21, 2023
Wafer stocker
SINFONIA TECHNOLOGY CO LTD0 citations62
US11610797B2Mar 21, 2023
Wafer stocker
SINFONIA TECHNOLOGY CO LTD0 citations62
US10947063B2Mar 16, 2021
Load port
SINFONIA TECHNOLOGY CO LTD1 citations62
US11823923B2Nov 21, 2023
Transfer chamber
SINFONIA TECHNOLOGY CO LTD0 citations61
US11424145B2Aug 23, 2022
Transfer chamber
SINFONIA TECHNOLOGY CO LTD0 citations61
US10930537B2Feb 23, 2021
Door opening/closing system, and load port equipped with door opening/closing system
SINFONIA TECHNOLOGY CO LTD0 citations61
US11851289B2Dec 26, 2023
Conveyance system for transferring frame wafer
SINFONIA TECHNOLOGY CO LTD0 citations50
US11710652B2Jul 25, 2023
Transport system
SINFONIA TECHNOLOGY CO LTD0 citations50
US11658047B2May 23, 2023
Exhaust nozzle unit, load port, and EFEM
SINFONIA TECHNOLOGY CO LTD0 citations50
US11139188B2Oct 5, 2021
Gas supply device, method for controlling gas supply device, load port, and semiconductor manufacturing apparatus
SINFONIA TECHNOLOGY CO LTD0 citations48
TOKYO ELECTRON LTD
5 patentsUS6540869B2Apr 1, 2003
Semiconductor processing system
TOKYO ELECTRON LTD68 citations96
US7279067B2Oct 9, 2007
Port structure in semiconductor processing system
TOKYO ELECTRON LTD33 citations92
US6984097B1Jan 10, 2006
Mounting/demounting device for wafer carrier lid
TOKYO ELECTRON LTD29 citations91
US6676356B2Jan 13, 2004
Device for attaching target substrate transfer container to semiconductor processing apparatus
TOKYO ELECTRON LTD12 citations73
US7393172B1Jul 1, 2008
Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device
TOKYO ELECTRON LTD5 citations61