Inventor
RADOMSKI AARON T
US32 patents
⚠️ This page may combine multiple inventors who share the name “RADOMSKI AARON T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
25 patentsUS10049857B2Aug 14, 2018
Adaptive periodic waveform controller
MKS INSTR INC47 citations97
US7728602B2Jun 1, 2010
Harmonic derived arc detector
MKS INSTR INC102 citations95
US9947514B2Apr 17, 2018
Plasma RF bias cancellation system
MKS INSTR INC42 citations93
US10741363B1Aug 11, 2020
Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching
MKS INSTR INC38 citations92
US10546724B2Jan 28, 2020
Pulsed, bidirectional radio frequency source/load
MKS INSTR INC40 citations92
US8736377B2May 27, 2014
RF pulse edge shaping
MKS INSTR INC24 citations91
US10217609B2Feb 26, 2019
Adaptive periodic waveform controller
MKS INSTR INC19 citations90
US10229816B2Mar 12, 2019
Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network
MKS INSTR INC17 citations85
US11935726B2Mar 19, 2024
High speed synchronization of plasma source/bias power delivery
MKS INSTR INC6 citations84
US11158488B2Oct 26, 2021
High speed synchronization of plasma source/bias power delivery
MKS INSTR INC13 citations84
US9136093B2Sep 15, 2015
Synchronization of RF pulsing with RF metrology, processing, and control
MKS INSTR INC9 citations84
US11536755B2Dec 27, 2022
System and method for arc detection using a bias RF generator signal
MKS INSTR INC13 citations83
US11232931B2Jan 25, 2022
Intermodulation distortion mitigation using electronic variable capacitor
MKS INSTR INC10 citations83
US10396601B2Aug 27, 2019
Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber
MKS INSTR INC7 citations83
US11527384B2Dec 13, 2022
Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances
MKS INSTR INC4 citations72
US10727027B2Jul 28, 2020
Adaptive periodic waveform controller
MKS INSTR INC1 citations72
US10930470B2Feb 23, 2021
Pulsed, bidirectional radio frequency source/load
MKS INSTR INC3 citations71
US9041480B2May 26, 2015
Virtual RF sensor
MKS INSTR INC4 citations71
US11533805B2Dec 20, 2022
Cooling and compression clamp for short lead power devices
MKS INSTR INC5 citations68
US11545943B2Jan 3, 2023
Switched capacitor modulator
MKS INSTR INC2 citations67
US11715624B2Aug 1, 2023
Adaptive pulse shaping with post match sensor
MKS INSTR INC1 citations62
US11367592B2Jun 21, 2022
Adaptive periodic waveform controller
MKS INSTR INC0 citations62
US11011940B2May 18, 2021
Piecewise RF power systems and methods for supplying pre-distorted RF bias voltage signals to an electrode in a processing chamber
MKS INSTR INC1 citations61
US11810762B2Nov 7, 2023
Intermodulation distortion mitigation using electronic variable capacitor
MKS INSTR INC0 citations60
US11076477B2Jul 27, 2021
Cooling and compression clamp for short lead power devices
MKS INSTR INC0 citations58
ENI TECHNOLOGY INC
5 patentsUS6417732B1Jul 9, 2002
Controller for RF power generator with reduced cable length sensitivity
ENI TECHNOLOGY INC43 citations92
US6778921B2Aug 17, 2004
Modular architecture for industrial power delivery system
ENI TECHNOLOGY INC47 citations91
US6700092B2Mar 2, 2004
Pulsing intelligent RF modulation controller
ENI TECHNOLOGY INC25 citations90
US6459067B1Oct 1, 2002
Pulsing intelligent RF modulation controller
ENI TECHNOLOGY INC19 citations90
US6868310B2Mar 15, 2005
Predictive failure scheme for industrial thin films processing power delivery system
ENI TECHNOLOGY INC17 citations83