Inventor
Oldziej Mariusz
US7 patents
Patents
7 patentsUS10229816B2Mar 12, 2019
Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network
MKS INSTR INC17 citations85
US11935726B2Mar 19, 2024
High speed synchronization of plasma source/bias power delivery
MKS INSTR INC6 citations84
US11158488B2Oct 26, 2021
High speed synchronization of plasma source/bias power delivery
MKS INSTR INC13 citations84
US11536755B2Dec 27, 2022
System and method for arc detection using a bias RF generator signal
MKS INSTR INC13 citations83
US11527384B2Dec 13, 2022
Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances
MKS INSTR INC4 citations72
US12183549B2Dec 31, 2024
Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances
MKS INSTR INC0 citations61
US12131884B2Oct 29, 2024
Pulse and bias synchronization methods and systems
MKS INSTR INC0 citations61