Inventor
REINHARDT Ross
US9 patents
Patents
9 patentsUS10546724B2Jan 28, 2020
Pulsed, bidirectional radio frequency source/load
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US9721758B2Aug 1, 2017
Unified RF power delivery single input, multiple output control for continuous and pulse mode operation
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US10395895B2Aug 27, 2019
Feedback control by RF waveform tailoring for ion energy distribution
MKS INSTR INC6 citations82
US9876476B2Jan 23, 2018
Supervisory control of radio frequency (RF) impedance tuning operation
MKS INSTR INC7 citations82
US11527384B2Dec 13, 2022
Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances
MKS INSTR INC4 citations72
US10930470B2Feb 23, 2021
Pulsed, bidirectional radio frequency source/load
MKS INSTR INC3 citations71
US10692698B2Jun 23, 2020
Feedback control by RF waveform tailoring for ion energy distribution
MKS INSTR INC2 citations71
US10666206B2May 26, 2020
Supervisory control of radio frequency (RF) impedance tuning operation
MKS INSTR INC2 citations71
US12183549B2Dec 31, 2024
Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances
MKS INSTR INC0 citations61