Inventor
Guo Bingliang
CN6 patents
Patents
6 patentsUS10643843B2May 5, 2020
Film forming method and aluminum nitride film forming method for semiconductor apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations68
US10640862B2May 5, 2020
Method for forming film and method for forming aluminum nitride film
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations68
US10937672B2Mar 2, 2021
Heating device and heating chamber
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations59
US11315768B2Apr 26, 2022
Loading apparatus and physical vapor deposition apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations55
US10984994B2Apr 20, 2021
Deposition apparatus and physical vapor deposition chamber
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations49
US11710624B2Jul 25, 2023
Sputtering method
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations44