Inventor

Ma Huaichao

CN4 patents

Patents

4 patents

US10643843B2May 5, 2020

Film forming method and aluminum nitride film forming method for semiconductor apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations68

US10640862B2May 5, 2020

Method for forming film and method for forming aluminum nitride film

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations68

US11315768B2Apr 26, 2022

Loading apparatus and physical vapor deposition apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations55

US11710624B2Jul 25, 2023

Sputtering method

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations44