Inventor
DONG BOYU
CN7 patents
⚠️ This page may combine multiple inventors who share the name “DONG BOYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD
6 patentsUS10643843B2May 5, 2020
Film forming method and aluminum nitride film forming method for semiconductor apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations68
US10640862B2May 5, 2020
Method for forming film and method for forming aluminum nitride film
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations68
US10937672B2Mar 2, 2021
Heating device and heating chamber
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations59
US11315768B2Apr 26, 2022
Loading apparatus and physical vapor deposition apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations55
US10984994B2Apr 20, 2021
Deposition apparatus and physical vapor deposition chamber
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations49
US11710624B2Jul 25, 2023
Sputtering method
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations44