Inventor
HAYAKAWA KOUICHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HAYAKAWA KOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
5 patentsUS7292327B2Nov 6, 2007
Circuit-pattern inspection apparatus
HITACHI HIGH TECH CORP21 citations92
US7223975B2May 29, 2007
Inspection apparatus for circuit pattern
HITACHI HIGH TECH CORP10 citations80
US7532328B2May 12, 2009
Circuit-pattern inspection apparatus
HITACHI HIGH TECH CORP7 citations73
US12174245B2Dec 24, 2024
Recipe information presentation system and recipe error inference system
HITACHI HIGH TECH CORP0 citations52
US12554571B2Feb 17, 2026
Error cause estimation device and estimation method
HITACHI HIGH TECH CORP0 citations51
HITACHI LTD
3 patentsUS6825480B1Nov 30, 2004
Charged particle beam apparatus and automatic astigmatism adjustment method
HITACHI LTD38 citations92
US7030394B2Apr 18, 2006
Charged particle beam apparatus and automatic astigmatism adjustment method
HITACHI LTD8 citations73
US7348558B2Mar 25, 2008
Charged particle beam apparatus and automatic astigmatism adjustment method
HITACHI LTD2 citations62