Inventor
SANDLAND PAUL
US7 patents
⚠️ This page may combine multiple inventors who share the name “SANDLAND PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA INSTR CORP
5 patentsUS4247203AJan 27, 1981
Automatic photomask inspection system and apparatus
KLA INSTR CORP281 citations97
US4644172AFeb 17, 1987
Electronic control of an automatic wafer inspection system
KLA INSTR CORP278 citations96
US4347001AAug 31, 1982
Automatic photomask inspection system and apparatus
KLA INSTR CORP157 citations96
US4618938AOct 21, 1986
Method and apparatus for automatic wafer inspection
KLA INSTR CORP247 citations95
US4556317ADec 3, 1985
X-Y Stage for a patterned wafer automatic inspection system
KLA INSTR CORP112 citations92