Inventor

SINGLETON RUSSELL M

US3 patents

⚠️ This page may combine multiple inventors who share the name “SINGLETON RUSSELL M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA INSTR CORP

2 patents

US4644172AFeb 17, 1987

Electronic control of an automatic wafer inspection system

KLA INSTR CORP278 citations96

US4618938AOct 21, 1986

Method and apparatus for automatic wafer inspection

KLA INSTR CORP247 citations95

US ENERGY

1 patent

US4196353AApr 1, 1980

Microradiographic microsphere manipulator

US ENERGY1 citations48