Inventor
TOKUI AKIRA
JP12 patents
⚠️ This page may combine multiple inventors who share the name “TOKUI AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
11 patentsUS5178682AJan 12, 1993
Method for forming a thin layer on a semiconductor substrate and apparatus therefor
MITSUBISHI ELECTRIC CORP661 citations98
US5174881ADec 29, 1992
Apparatus for forming a thin film on surface of semiconductor substrate
MITSUBISHI ELECTRIC CORP448 citations98
US5470799ANov 28, 1995
Method for pretreating semiconductor substrate by photochemically removing native oxide
MITSUBISHI ELECTRIC CORP54 citations96
US5028560AJul 2, 1991
Method for forming a thin layer on a semiconductor substrate
MITSUBISHI ELECTRIC CORP71 citations96
US5258266ANov 2, 1993
Method of forming minute patterns using positive chemically amplifying type resist
MITSUBISHI ELECTRIC CORP33 citations92
US5270796ADec 14, 1993
Apparatus for inspecting a phase shift mask
MITSUBISHI ELECTRIC CORP28 citations91
US5158861AOct 27, 1992
Method of forming minute patterns using chemically amplifying type resist
MITSUBISHI ELECTRIC CORP21 citations81
US4702796AOct 27, 1987
Method for fabricting a semiconductor device
MITSUBISHI ELECTRIC CORP9 citations74
US5384218AJan 24, 1995
Photomask and pattern transfer method for transferring a pattern onto a substrate having different levels
MITSUBISHI ELECTRIC CORP15 citations66
US4956310ASep 11, 1990
Semiconductor memory device and fabricating method thereof
MITSUBISHI ELECTRIC CORP0 citations52
US4763182AAug 9, 1988
Semiconductor memory device with deep bit-line channel stopper
MITSUBISHI ELECTRIC CORP0 citations42