Inventor
UCHIYAMA ISAO
JP14 patents
Patents
14 patentsUS5081795AJan 21, 1992
Polishing apparatus
SHINETSU HANDOTAI KK177 citations99
US5317778AJun 7, 1994
Automatic cleaning apparatus for wafers
SHINETSU HANDOTAI KK79 citations94
US5665168ASep 9, 1997
Method for cleaning semiconductor silicon wafer
SHINETSU HANDOTAI KK26 citations92
US5626681AMay 6, 1997
Method of cleaning semiconductor wafers
SHINETSU HANDOTAI KK26 citations92
US5503173AApr 2, 1996
Wafer cleaning tank
SHINETSU HANDOTAI KK42 citations92
US5282289AFeb 1, 1994
Scrubber apparatus for cleaning a thin disk work
SHINETSU HANDOTAI KK30 citations92
US5547515AAug 20, 1996
Method for handling or processing semiconductor wafers
SHINETSU HANDOTAI KK40 citations91
US6110839AAug 29, 2000
Method of purifying alkaline solution and method of etching semiconductor wafers
SHINETSU HANDOTAI KK30 citations90
US5581837ADec 10, 1996
Brush cleaning apparatus and cleaning system for disk-shaped objects using same
SHINETSU HANDOTAI KK41 citations89
US5595412AJan 21, 1997
Device for handling wafers
SHINETSU HANDOTAI KK13 citations74
US5555634ASep 17, 1996
Wafer holder
SHINETSU HANDOTAI KK13 citations74
US5662743ASep 2, 1997
Method of cleaning silicon wafers in cleaning baths with controlled vertical surface oscillations and controlled in/out speeds
SHINETSU HANDOTAI KK8 citations73
US5640238AJun 17, 1997
Method of inspecting particles on wafers
SHINETSU HANDOTAI KK14 citations73
US6319845B1Nov 20, 2001
Method of purifying alkaline solution and method of etching semiconductor wafers
SHINETSU HANDOTAI KK8 citations71