Inventor
SUZUKI MORIE
JP5 patents
Patents
5 patentsUS5317778AJun 7, 1994
Automatic cleaning apparatus for wafers
SHINETSU HANDOTAI KK79 citations94
US5547515AAug 20, 1996
Method for handling or processing semiconductor wafers
SHINETSU HANDOTAI KK40 citations91
US5581837ADec 10, 1996
Brush cleaning apparatus and cleaning system for disk-shaped objects using same
SHINETSU HANDOTAI KK41 citations89
US5662743ASep 2, 1997
Method of cleaning silicon wafers in cleaning baths with controlled vertical surface oscillations and controlled in/out speeds
SHINETSU HANDOTAI KK8 citations73
US5640238AJun 17, 1997
Method of inspecting particles on wafers
SHINETSU HANDOTAI KK14 citations73