Inventor
KIEU HOA
US7 patents
Patents
7 patentsUS5911113AJun 8, 1999
Silicon-doped titanium wetting layer for aluminum plug
APPLIED MATERIALS INC65 citations96
US5780357AJul 14, 1998
Deposition process for coating or filling re-entry shaped contact holes
APPLIED MATERIALS INC65 citations95
US5847461ADec 8, 1998
Integrated circuit structure having contact openings and vias filled by self-extrusion of overlying metal layer
APPLIED MATERIALS INC20 citations91
US5668055ASep 16, 1997
Method of filling of contact openings and vias by self-extrusion of overlying compressively stressed matal layer
APPLIED MATERIALS INC30 citations91
US6312568B2Nov 6, 2001
Two-step AIN-PVD for improved film properties
APPLIED MATERIALS INC19 citations86
US6033541AMar 7, 2000
Deposition process for coating or filling re-entry shaped contact holes
APPLIED MATERIALS INC7 citations73
US6232665B1May 15, 2001
Silicon-doped titanium wetting layer for aluminum plug
APPLIED MATERIALS INC1 citations52