Inventor

HERGENHAN GUIDO

DE21 patents

⚠️ This page may combine multiple inventors who share the name “HERGENHAN GUIDO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HERGENHAN GUIDO

XTREME TECH GMBH

Arrangement for the generation of intensive short-wave radiation based on a plasma

Arrangement and method for the generation of extreme ultraviolet radiation

Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation

Method and arrangement for the plasma-based generation of intensive short-wavelength radiation

Radiation source for the generation of short-wavelength radiation

Method and arrangement for the plasma-based generation of soft x-radiation

Arrangement for the stabilization of the radiation emission of a plasma

Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation

Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation

Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated

Arrangement for generating extreme ultraviolet radiation by means of an electrically operated gas discharge

Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma

Arrangement for the generation of a pulsed laser beam of high average output

Arrangement for radiation generation by means of a gas discharge

Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge

Arrangement for generating extreme ultraviolet radiation based on an electrically operated gas discharge

JENOPTIK OPTICAL SYS GMBH

Method for making a thermally stable connection between a glass element and a support element, method for producing an optical device, and optical device

Method for integrally bonding a glass element to a support element, and optical device

HERGENHAN GUIDO

Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources

DEUTSCH ZENTR LUFT & RAUMFAHRT

Laser radiation source and process for generating a coherent total laser radiation field

MILASYS GBR

Positioning device