Inventor

MUTHINTI GANGADHARA RAJA

US18 patents

⚠️ This page may combine multiple inventors who share the name “MUTHINTI GANGADHARA RAJA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MUTHINTI GANGADHARA RAJA

IBM

Gate contact over active enabled by alternative spacer scheme and claw-shaped cap

Hybrid BEOL metallization utilizing selective reflection mask

Semiconductor device with linerless contacts

Single metallization scheme for gate, source, and drain contact integration

Dielectric damage-free dual damascene Cu interconnects without barrier at via bottom

Single metallization scheme for gate, source, and drain contact integration

Hybrid BEOL metallization utilizing selective reflection mask

Pre-patterned etch stop for interconnect trench formation overlying embedded MRAM structures

Dielectric damage-free dual damascene Cu interconnects without barrier at via bottom

Secure fingerprinting of a trusted photomask

Determination of optical roughness in EUV structures

Determination of optical roughness in EUV structures

Semiconductor device with linerless contacts

Multi-channel overlay metrology

Gate cut critical dimension shrink and active gate defect healing using selective deposition

Hybridization for characterization and metrology

Adjustable via dimension and chamfer angle

META PLATFORMS TECH LLC

Techniques for characterizing films on optically clear substrates using ellipsometry