Inventor
BLACKMAN BRIAN PAUL
US4 patents
Patents
4 patentsUS6773571B1Aug 10, 2004
Method and apparatus for uniform electroplating of thin metal seeded wafers using multiple segmented virtual anode sources
NOVELLUS SYSTEMS INC144 citations97
US10301738B2May 28, 2019
Methods and apparatus for wetting pretreatment for through resist metal plating
NOVELLUS SYSTEMS INC1 citations71
US10128102B2Nov 13, 2018
Methods and apparatus for wetting pretreatment for through resist metal plating
NOVELLUS SYSTEMS INC2 citations71
US9828688B2Nov 28, 2017
Methods and apparatus for wetting pretreatment for through resist metal plating
NOVELLUS SYSTEMS INC3 citations71