Inventor
SCHOENHOFF ULRICH
DE15 patents
⚠️ This page may combine multiple inventors who share the name “SCHOENHOFF ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
11 patentsUS8786826B1Jul 22, 2014
Arrangement for actuating an element in a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH5 citations84
US10185221B2Jan 22, 2019
Arrangement for actuating an element in a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations73
US9568837B2Feb 14, 2017
Arrangement for actuating an element in a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH2 citations73
US9304404B2Apr 5, 2016
Arrangement for actuating an element in a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH5 citations72
US9410662B2Aug 9, 2016
Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus
ZEISS CARL SMT GMBH3 citations69
US9448384B2Sep 20, 2016
Arrangement for mounting an optical element
ZEISS CARL SMT GMBH3 citations67
US9841682B2Dec 12, 2017
Arrangement for actuating an element in a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations62
US9081292B2Jul 14, 2015
Arrangement for actuating an element in a projection exposure apparatus
ZEISS CARL SMT GMBH3 citations62
US10108097B2Oct 23, 2018
Arrangement for manipulating the position of an element
ZEISS CARL SMT GMBH1 citations45
US11703770B2Jul 18, 2023
Compensation of creep effects in an imaging device
ZEISS CARL SMT GMBH0 citations44
US10838306B2Nov 17, 2020
Optical system, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations40