Inventor
SUWADA MASAEI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SUWADA MASAEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM JAPAN
9 patentsUS8041450B2Oct 18, 2011
Position sensor system for substrate transfer robot
ASM JAPAN531 citations99
US7618226B2Nov 17, 2009
Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same
ASM JAPAN538 citations99
US7021881B2Apr 4, 2006
Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections
ASM JAPAN545 citations99
US6899507B2May 31, 2005
Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections
ASM JAPAN561 citations99
US6662817B2Dec 16, 2003
Gas-line system for semiconductor-manufacturing apparatus
ASM JAPAN496 citations99
US7963736B2Jun 21, 2011
Wafer processing apparatus with wafer alignment device
ASM JAPAN539 citations98
US6305898B1Oct 23, 2001
Wafer transfer mechanism
ASM JAPAN567 citations96
US6630053B2Oct 7, 2003
Semiconductor processing module and apparatus
ASM JAPAN55 citations92
US6945746B2Sep 20, 2005
Semiconductor manufacturing equipment and maintenance method
ASM JAPAN5 citations63
ASM IP HOLDING BV
4 patentsUS9349620B2May 24, 2016
Apparatus and method for pre-baking substrate upstream of process chamber
ASM IP HOLDING BV472 citations96
US10403514B1Sep 3, 2019
Substrate transporting system, storage medium and substrate transporting method
ASM IP HOLDING BV8 citations84
US11247330B2Feb 15, 2022
Method for teaching a transportation position and alignment jig
ASM IP HOLDING BV1 citations62
USD1106977SDec 23, 2025
End effector
ASM IP HOLDING BV0 citations54