Inventor
MORI ISAMU
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MORI ISAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CENTRAL GLASS CO LTD
6 patentsUS6673262B1Jan 6, 2004
Gas for removing deposit and removal method using same
CENTRAL GLASS CO LTD14 citations92
US9234133B2Jan 12, 2016
Etching gas
CENTRAL GLASS CO LTD4 citations72
US9524877B2Dec 20, 2016
Silicon dry etching method
CENTRAL GLASS CO LTD2 citations59
US10872780B2Dec 22, 2020
Dry etching agent composition and dry etching method
CENTRAL GLASS CO LTD0 citations51
US9230821B2Jan 5, 2016
Dry etching agent and dry etching method using the same
CENTRAL GLASS CO LTD0 citations51
US7417167B2Aug 26, 2008
Process for producing carbonyl difluoride
CENTRAL GLASS CO LTD1 citations51