Inventor
YABE KAZUO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “YABE KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS8853100B2Oct 7, 2014
Film formation method, film formation apparatus and storage medium
TOKYO ELECTRON LTD9 citations82
US10351952B2Jul 16, 2019
Film formation apparatus, film formation method, and storage medium
TOKYO ELECTRON LTD2 citations72
US9552981B2Jan 24, 2017
Method and apparatus for forming metal oxide film
TOKYO ELECTRON LTD2 citations72
US9425071B2Aug 23, 2016
Film forming method
TOKYO ELECTRON LTD3 citations72
US11781219B2Oct 10, 2023
Processing apparatus and processing method
TOKYO ELECTRON LTD0 citations62
US7368384B2May 6, 2008
Film formation apparatus and method of using the same
TOKYO ELECTRON LTD4 citations61
US12438055B2Oct 7, 2025
Abnormality detection method and processing apparatus
TOKYO ELECTRON LTD0 citations58
US11923177B2Mar 5, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations47
US10290496B2May 14, 2019
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations41