Inventor

SCHEPERS MAIKEL ADRIANUS CORNELIS

NL5 patents

⚠️ This page may combine multiple inventors who share the name “SCHEPERS MAIKEL ADRIANUS CORNELIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DIRECKS DANIEL JOZEF MARIA

2 patents

US8421993B2Apr 16, 2013

Fluid handling structure, lithographic apparatus and device manufacturing method

DIRECKS DANIEL JOZEF MARIA14 citations80

US9618835B2Apr 11, 2017

Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure

DIRECKS DANIEL JOZEF MARIA0 citations39

PHILIPS DANNY MARIA HUBERTUS

2 patents

US8405815B2Mar 26, 2013

Fluid handling structure, lithographic apparatus and device manufacturing method

PHILIPS DANNY MARIA HUBERTUS1 citations46

US8638417B2Jan 28, 2014

Fluid handling structure, lithographic apparatus and a device manufacturing method

PHILIPS DANNY MARIA HUBERTUS1 citations45

SCHEPERS MAIKEL ADRIANUS CORNELIS

1 patent

US8680493B2Mar 25, 2014

Radiation conduit for radiation source

SCHEPERS MAIKEL ADRIANUS CORNELIS3 citations50