Inventor
OKAMOTO EIICHIRO
JP6 patents
Patents
6 patentsUS9536761B2Jan 3, 2017
Substrate liquid processing apparatus
TOKYO ELECTRON LTD5 citations71
US9793142B2Oct 17, 2017
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD1 citations51
US9782807B2Oct 10, 2017
Substrate processing system, method for controlling substrate processing system, and storage medium
TOKYO ELECTRON LTD0 citations50
US9895711B2Feb 20, 2018
Substrate liquid processing apparatus, substrate liquid processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations40
US9818626B2Nov 14, 2017
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations40
US10713772B2Jul 14, 2020
Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium
TOKYO ELECTRON LTD0 citations37