Inventor
HOEKERD KORNELIS TIJMEN
NL15 patents
⚠️ This page may combine multiple inventors who share the name “HOEKERD KORNELIS TIJMEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS9645508B2May 9, 2017
Lithographic apparatus and surface cleaning method
ASML NETHERLANDS BV3 citations84
US7900641B2Mar 8, 2011
Cleaning device and a lithographic apparatus cleaning method
ASML NETHERLANDS BV12 citations82
US7866330B2Jan 11, 2011
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
ASML NETHERLANDS BV9 citations82
US7841352B2Nov 30, 2010
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
ASML NETHERLANDS BV9 citations82
US10241418B2Mar 26, 2019
Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus
ASML NETHERLANDS BV9 citations80
US10437156B2Oct 8, 2019
Lithographic apparatus and surface cleaning method
ASML NETHERLANDS BV2 citations73
US9261796B2Feb 16, 2016
Lithographic apparatus and surface cleaning method
ASML NETHERLANDS BV3 citations73
US10613445B2Apr 7, 2020
Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process
ASML NETHERLANDS BV3 citations69
US9927716B2Mar 27, 2018
Lithographic apparatus and surface cleaning method
ASML NETHERLANDS BV1 citations62
US10185223B2Jan 22, 2019
Lithographic apparatus and surface cleaning method
ASML NETHERLANDS BV0 citations52
US8011377B2Sep 6, 2011
Cleaning device and a lithographic apparatus cleaning method
ASML NETHERLANDS BV1 citations50
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS
2 patentsUS9013672B2Apr 21, 2015
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations48
US8947629B2Feb 3, 2015
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method
DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS0 citations38