Inventor
WELTE JOACHIM
DE12 patents
⚠️ This page may combine multiple inventors who share the name “WELTE JOACHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
6 patentsUS11355311B2Jun 7, 2022
Method and apparatus for determining a wavefront of a massive particle beam
ZEISS CARL SMT GMBH0 citations61
US12535726B2Jan 27, 2026
Method and apparatus for setting a side wall angle of a pattern element of a photolithographic mask
ZEISS CARL SMT GMBH0 citations59
US11366382B2Jun 21, 2022
Method and apparatus for performing an aerial image simulation of a photolithographic mask
ZEISS CARL SMT GMBH1 citations58
US11487211B2Nov 1, 2022
Device and method for processing a microstructured component
ZEISS CARL SMT GMBH0 citations54
US11249294B2Feb 15, 2022
Optical system and method for correcting mask defects using the system
ZEISS CARL SMT GMBH0 citations48
US10578975B2Mar 3, 2020
Method for correcting the critical dimension uniformity of a photomask for semiconductor lithography
ZEISS CARL SMT GMBH0 citations37
ZEISS CARL SMS LTD
3 patentsUS11385539B2Jul 12, 2022
Method and apparatus for compensating defects of a mask blank
ZEISS CARL SMS LTD0 citations58
US11366383B2Jun 21, 2022
Method and apparatus for determining positions of a plurality of pixels to be introduced in a substrate of a photolithographic mask
ZEISS CARL SMS LTD0 citations52
US11914289B2Feb 27, 2024
Method and apparatus for determining an effect of one or more pixels to be introduced into a substrate of a photolithographic mask
ZEISS CARL SMS LTD0 citations44