Inventor
ISONO SHINTARO
JP4 patents
Patents
4 patentsUS10464185B2Nov 5, 2019
Substrate polishing method, top ring, and substrate polishing apparatus
EBARA CORP2 citations72
US10391603B2Aug 27, 2019
Polishing apparatus, control method and recording medium
EBARA CORP4 citations72
US10213896B2Feb 26, 2019
Elastic membrane, substrate holding apparatus, and polishing apparatus
EBARA CORP0 citations51
US9999956B2Jun 19, 2018
Polishing device and polishing method
EBARA CORP0 citations51