Inventor
MITSUMORI AKIYOSHI
JP13 patents
Patents
13 patentsUS10825660B2Nov 3, 2020
Electrostatic chuck and plasma processing apparatus
TOKYO ELECTRON LTD5 citations82
US10796889B2Oct 6, 2020
Processing apparatus for target object and inspection method for processing apparatus
TOKYO ELECTRON LTD3 citations72
US11476095B2Oct 18, 2022
Electrostatic chuck and plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US10818480B2Oct 27, 2020
Method of operating electrostatic chuck of plasma processing apparatus
TOKYO ELECTRON LTD1 citations61
US10665432B2May 26, 2020
Temperature control method
TOKYO ELECTRON LTD1 citations61
US11566728B2Jan 31, 2023
Flexible pipe and temperature control system
TOKYO ELECTRON LTD0 citations60
US11404251B2Aug 2, 2022
Processing apparatus for processing target object
TOKYO ELECTRON LTD1 citations60
US12068143B2Aug 20, 2024
Temperature adjustment method
TOKYO ELECTRON LTD0 citations50
US11869799B2Jan 9, 2024
Temperature adjustment system
TOKYO ELECTRON LTD0 citations50
US11236420B2Feb 1, 2022
Cleaning method
TOKYO ELECTRON LTD0 citations50
US11060770B2Jul 13, 2021
Cooling system
TOKYO ELECTRON LTD0 citations50
US10910200B2Feb 2, 2021
Plasma processing apparatus and precoating method
TOKYO ELECTRON LTD0 citations50
US10787950B2Sep 29, 2020
Heat insulating pipe system and processing system
TOKYO ELECTRON LTD0 citations49