Inventor
SU FU-HSIANG
TW14 patents
Patents
14 patentsUS10825721B2Nov 3, 2020
Insulating cap on contact structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations83
US12040225B2Jul 16, 2024
Insulating cap on contact structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US11139203B2Oct 5, 2021
Using mask layers to facilitate the formation of self-aligned contacts and vias
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12074218B2Aug 27, 2024
Contact structure with insulating cap
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10950729B2Mar 16, 2021
Contact structure with insulating cap
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12588237B2Mar 24, 2026
Method for forming via structure with low resistivity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11837663B2Dec 5, 2023
Via structure with low resistivity and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11393717B2Jul 19, 2022
Insulating cap on contact structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11081585B2Aug 3, 2021
Via structure with low resistivity and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11018057B2May 25, 2021
Semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10658237B2May 19, 2020
Semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US11658215B2May 23, 2023
Method of forming contact structures
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US10693004B2Jun 23, 2020
Via structure with low resistivity and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10879400B2Dec 29, 2020
Field effect transistor and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41