Inventor
BEASLEY CARA
US20 patents
⚠️ This page may combine multiple inventors who share the name “BEASLEY CARA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS9612522B2Apr 4, 2017
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
APPLIED MATERIALS INC36 citations93
US9354508B2May 31, 2016
Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor
APPLIED MATERIALS INC5 citations83
US9417515B2Aug 16, 2016
Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor
APPLIED MATERIALS INC8 citations82
US9739913B2Aug 22, 2017
Extreme ultraviolet capping layer and method of manufacturing and lithography thereof
APPLIED MATERIALS INC8 citations80
US11493841B2Nov 8, 2022
Glass ceramic for ultraviolet lithography and method of manufacturing thereof
APPLIED MATERIALS INC2 citations73
US9595436B2Mar 14, 2017
Growing graphene on substrates
APPLIED MATERIALS INC4 citations73
US10551732B2Feb 4, 2020
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
APPLIED MATERIALS INC1 citations72
US10209613B2Feb 19, 2019
System and method for manufacturing planarized extreme ultraviolet lithography blank
APPLIED MATERIALS INC2 citations72
US9581889B2Feb 28, 2017
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor
APPLIED MATERIALS INC3 citations72
US9581890B2Feb 28, 2017
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof
APPLIED MATERIALS INC3 citations72
US10788744B2Sep 29, 2020
Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor
APPLIED MATERIALS INC0 citations52
US10551731B2Feb 4, 2020
Glass ceramic for ultraviolet lithography and method of manufacturing thereof
APPLIED MATERIALS INC0 citations52
US9905418B2Feb 27, 2018
Growing graphene on substrates
APPLIED MATERIALS INC0 citations52
US10197907B2Feb 5, 2019
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor
APPLIED MATERIALS INC0 citations51
US10012897B2Jul 3, 2018
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor
APPLIED MATERIALS INC0 citations51
US10012908B2Jul 3, 2018
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof
APPLIED MATERIALS INC0 citations51
US9690016B2Jun 27, 2017
Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof
APPLIED MATERIALS INC0 citations51