Inventor

CHI CHIH-CHIEN

TW57 patents

⚠️ This page may combine multiple inventors who share the name “CHI CHIH-CHIEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHI CHIH-CHIEN

TAIWAN SEMICONDUCTOR MFG CO LTD

Interconnect structure and method

Method of forming an interconnect structure having an air gap and structure thereof

Multi-layer film device and method

Multi-layer film device and method

Interconnect structure and method

Multi-layer film device and method

Interconnect structure having air gap and method of forming the same

Semiconductor devices and methods of forming same

Method of forming an interconnect structure having an air gap and structure thereof

Selective capping processes and structures formed thereby

Selective capping processes and structures formed thereby

Interconnect structure and method

Semiconductor devices and methods of forming same

Method of forming an interconnect structure having an air gap and structure thereof

Physical vapor deposition system and physical vapor depositing method using the same

Self-aligned repairing process for barrier layer

Plasma apparatus, magnetic-field controlling method, and semiconductor manufacturing method

Selective repairing process for barrier layer

Selective capping processes and structures formed thereby

Interconnect structure and method of forming thereof

Method for manufacturing semiconductor device and pre-clean apparatus for semiconductor device

Method of manufacturing a semiconductor device structure

Conductive structures with barriers and liners of varying thicknesses

Graphene liners and caps for semiconductor structures

Multi-layer film device and method

Method of forming an interconnect structure having an air gap and structure thereof

Semiconductor device, method and machine of manufacture

Selective capping processes and structures formed thereby

Multi-layer film device and method

Semiconductor device, method and machine of manufacture

Interconnect structure and method

Method of forming an interconnect in a semiconductor device

Method of forming an interconnect structure having an air gap and structure thereof

Graphite-based interconnects and methods of fabrication thereof

Semiconductor devices and methods of formation

Interconnect structure of semiconductor device

Semiconductor device having a contact structure

Nitrogen plasma treatment for improving interface between etch stop layer and copper interconnect

Method of making a contact structure

Contact structure and method of making

Interconnect structure including graphite and method forming same

Method of forming interconnect structure having a barrier layer

Hybrid conductive structures

Method for forming semiconductor device

Forming liners to facilitate the formation of copper-containing vias in advanced technology nodes

Method of forming an interconnect structure having an air gap and structure thereof

Metal capping process and processing platform thereof

Method of integration process for metal CMP

TAIWAN SEMICONDUCTOR MFG

Structure and method for forming interconnect structure

Interconnect structure having air gap and method of forming the same