Inventor
LI CHUNG-HSUN
NL8 patents
Patents
8 patentsUS10317191B2Jun 11, 2019
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV4 citations82
US10996176B2May 4, 2021
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US10746668B2Aug 18, 2020
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV2 citations71
US11977034B2May 7, 2024
Methods and apparatus for measuring a property of a substrate
ASML NETHERLANDS BV0 citations61
US11774869B2Oct 3, 2023
Method and system for determining overlay
ASML NETHERLANDS BV0 citations59
US12204252B2Jan 21, 2025
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations56
US11687007B2Jun 27, 2023
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV1 citations56
US11774861B2Oct 3, 2023
Calibration method for a lithographic system
ASML NETHERLANDS BV0 citations54