Inventor
TSIROGIANNIS GEORGIOS
NL7 patents
Patents
7 patentsUS11099486B2Aug 24, 2021
Generating predicted data for control or monitoring of a production process
ASML NETHERLANDS BV3 citations70
US11774869B2Oct 3, 2023
Method and system for determining overlay
ASML NETHERLANDS BV0 citations59
US11099485B2Aug 24, 2021
Maintaining a set of process fingerprints
ASML NETHERLANDS BV0 citations57
US12204252B2Jan 21, 2025
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations56
US11687007B2Jun 27, 2023
Method for decision making in a semiconductor manufacturing process
ASML NETHERLANDS BV1 citations56
US11520238B2Dec 6, 2022
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56
US11150562B2Oct 19, 2021
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56