Inventor
ZENG SI-HAN
NL5 patents
Patents
5 patentsUS11796978B2Oct 24, 2023
Method for determining root causes of events of a semiconductor manufacturing process and for monitoring a semiconductor manufacturing process
ASML NETHERLANDS BV3 citations68
US9869940B2Jan 16, 2018
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV3 citations68
US11774869B2Oct 3, 2023
Method and system for determining overlay
ASML NETHERLANDS BV0 citations59
US10261427B2Apr 16, 2019
Metrology method and apparatus, computer program and lithographic system
ASML NETHERLANDS BV1 citations58
US10474043B2Nov 12, 2019
Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations39