Inventor
KUINDERSMA LUCAS
NL3 patents
Patents
3 patentsUS11961700B2Apr 16, 2024
Systems and methods for image enhancement for a multi-beam charged-particle inspection system
ASML NETHERLANDS BV0 citations57
US10649347B2May 12, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations57
US11302512B2Apr 12, 2022
Electron beam inspection apparatus stage positioning
ASML NETHERLANDS BV0 citations47