Inventor
AARTS IGOR MATHEUS PETRONELLA
US16 patents
⚠️ This page may combine multiple inventors who share the name “AARTS IGOR MATHEUS PETRONELLA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
10 patentsUS11971665B2Apr 30, 2024
Wafer alignment using form birefringence of targets or product
ASML HOLDING NV2 citations72
US10802208B2Oct 13, 2020
Broad spectrum radiation by supercontinuum generation using a tapered optical fiber
ASML HOLDING NV3 citations70
US10488767B2Nov 26, 2019
Alignment system wafer stack beam analyzer
ASML HOLDING NV2 citations69
US11899380B2Feb 13, 2024
Apparatus for and method of sensing alignment marks
ASML HOLDING NV0 citations61
US12474647B2Nov 18, 2025
Generating an alignment signal based on local alignment mark distortions
ASML HOLDING NV0 citations59
US11156928B2Oct 26, 2021
Alignment mark for two-dimensional alignment in an alignment system
ASML HOLDING NV0 citations55
US10481507B2Nov 19, 2019
Measurement method comprising in-situ printing of apparatus mark and corresponding apparatus
ASML HOLDING NV0 citations50
US11513446B2Nov 29, 2022
Adaptive alignment
ASML HOLDING NV0 citations44
US11493852B2Nov 8, 2022
Noise correction for alignment signal
ASML HOLDING NV0 citations44
US10928738B2Feb 23, 2021
Adaptive filter for in-line correction
ASML HOLDING NV0 citations40
ASML NETHERLANDS BV
3 patentsUS12032299B2Jul 9, 2024
Metrology method and associated metrology and lithographic apparatuses
ASML NETHERLANDS BV2 citations71
US11175593B2Nov 16, 2021
Alignment sensor apparatus for process sensitivity compensation
ASML NETHERLANDS BV4 citations69
US12461457B2Nov 4, 2025
Asymmetry extended grid model for wafer alignment
ASML NETHERLANDS BV0 citations44