Inventor
KUNUGIMOTO YUICHIRO
JP8 patents
Patents
8 patentsUS11637031B2Apr 25, 2023
Systems and methods for spin process video analysis during substrate processing
TOKYO ELECTRON LTD0 citations61
US12174549B2Dec 24, 2024
Liquid amount measuring method and computer-readable recording medium
TOKYO ELECTRON LTD0 citations56
US11726409B2Aug 15, 2023
Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig
TOKYO ELECTRON LTD0 citations56
US12244972B2Mar 4, 2025
Substrate processing monitoring apparatus based on imaging video data, substrate processing apparatus, substrate processing monitoring method, and storage medium
TOKYO ELECTRON LTD0 citations55
US12057327B2Aug 6, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations48
US11914298B2Feb 27, 2024
Liquid processing apparatus and method of detecting liquid in liquid processing apparatus
TOKYO ELECTRON LTD0 citations46
US10248030B2Apr 2, 2019
Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatus
TOKYO ELECTRON LTD0 citations38
US9766543B2Sep 19, 2017
Liquid treatment method, substrate processing apparatus and non-transitory storage medium
TOKYO ELECTRON LTD0 citations38