Inventor
NISHIYAMA YUTA
JP3 patents
Patents
3 patentsUS12174549B2Dec 24, 2024
Liquid amount measuring method and computer-readable recording medium
TOKYO ELECTRON LTD0 citations56
US11726409B2Aug 15, 2023
Substrate processing system, liquid amount measuring method, computer-readable recording medium, and measuring jig
TOKYO ELECTRON LTD0 citations56
US11161136B2Nov 2, 2021
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD0 citations35