Inventor

KATO SUEHIRO

5 patents

Patents

5 patents

US4309266AJan 5, 1982

Magnetron sputtering apparatus

MURATA MANUFACTURING CO40 citations92

US4290876ASep 22, 1981

Sputtering apparatus

MURATA MANUFACTURING CO26 citations81

US4318796AMar 9, 1982

Sputtering apparatus

MURATA MANUFACTURING CO15 citations73

US4410408AOct 18, 1983

Method of preparing zinc oxide film

MURATA MANUFACTURING CO8 citations72

US4464422AAug 7, 1984

Process for preventing oxidation of copper film on ceramic body

MURATA MANUFACTURING CO6 citations71