Inventor
TABUCHI HIROKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TABUCHI HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHARP KK
10 patentsUS5480047AJan 2, 1996
Method for forming a fine resist pattern
SHARP KK153 citations97
US4928513AMay 29, 1990
Sensor
SHARP KK103 citations96
US5389474AFeb 14, 1995
Mask for photolithography
SHARP KK28 citations92
US5048336ASep 17, 1991
Moisture-sensitive device
SHARP KK40 citations92
US4805296AFeb 21, 1989
Method of manufacturing platinum resistance thermometer
SHARP KK29 citations92
US5353116AOct 4, 1994
Defect inspection system for phase shift masks
SHARP KK12 citations73
US5330862AJul 19, 1994
Method for forming resist mask pattern by light exposure having a phase shifter pattern comprising convex forms in the resist
SHARP KK17 citations73
US5403685AApr 4, 1995
Lithographic process for producing small mask apertures and products thereof
SHARP KK8 citations72
US6103428AAug 15, 2000
Photomask utilizing auxiliary pattern that is not transferred with the resist pattern
SHARP KK12 citations71
US4649365AMar 10, 1987
Platinum resistor for the measurement of temperatures
SHARP KK2 citations62