Inventor
YAMAMOTO SEIGOU
JP3 patents
Patents
3 patentsUS5976641ANov 2, 1999
A1 alloy films and melting A1 alloy sputtering targets for depositing A1 alloy films
KOBE STEEL LTD22 citations91
US5500301AMar 19, 1996
A1 alloy films and melting A1 alloy sputtering targets for depositing A1 alloy films
KOBE STEEL LTD21 citations91
US6206985B1Mar 27, 2001
A1 alloy films and melting A1 alloy sputtering targets for depositing A1 alloy films
KOBE STEEL LTD11 citations72