P

Inventor

WOLFF STEFAN

US32 patents
⚠️ This page may combine multiple inventors who share the name “WOLFF STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

15 patents
US6129044AOct 10, 2000

Apparatus for substrate processing with improved throughput and yield

APPLIED MATERIALS INC578 citations99
US6035101AMar 7, 2000

High temperature multi-layered alloy heater assembly and related methods

APPLIED MATERIALS INC963 citations99
US5846332ADec 8, 1998

Thermally floating pedestal collar in a chemical vapor deposition chamber

APPLIED MATERIALS INC863 citations99
US6189482B1Feb 20, 2001

High temperature, high flow rate chemical vapor deposition apparatus and related methods

APPLIED MATERIALS INC447 citations98
US6051286AApr 18, 2000

High temperature, high deposition rate process and apparatus for depositing titanium layers

APPLIED MATERIALS INC170 citations98
US5983906ANov 16, 1999

Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment

APPLIED MATERIALS INC153 citations98
US5968379AOct 19, 1999

High temperature ceramic heater assembly with RF capability and related methods

APPLIED MATERIALS INC262 citations98
US5964947AOct 12, 1999

Removable pumping channel liners within a chemical vapor deposition chamber

APPLIED MATERIALS INC96 citations98
US5558717ASep 24, 1996

CVD Processing chamber

APPLIED MATERIALS INC1,163 citations98
US6270859B2Aug 7, 2001

Plasma treatment of titanium nitride formed by chemical vapor deposition

APPLIED MATERIALS INC42 citations96
US5853607ADec 29, 1998

CVD processing chamber

APPLIED MATERIALS INC91 citations96
US5994678ANov 30, 1999

Apparatus for ceramic pedestal and metal shaft assembly

APPLIED MATERIALS INC89 citations95
US5643364AJul 1, 1997

Plasma chamber with fixed RF matching

APPLIED MATERIALS INC167 citations95
US6366346B1Apr 2, 2002

Method and apparatus for optical detection of effluent composition

APPLIED MATERIALS INC89 citations94
US5902494AMay 11, 1999

Method and apparatus for reducing particle generation by limiting DC bias spike

APPLIED MATERIALS INC25 citations92

BASF AG

9 patents

GM GLOBAL TECH OPERATIONS INC

4 patents

GM GLOBAL TECH OPERATIONS LLC

2 patents

SCHAEFER JOACHIM

1 patent

SCHWERDT JOERG

1 patent