Inventor

HARIMA YOSHIYUKI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “HARIMA YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US5971696AOct 26, 1999

System for carrying-in of cassette for substrates to be processed

TOKYO ELECTRON LTD22 citations87

US11244810B2Feb 8, 2022

Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus

TOKYO ELECTRON LTD2 citations70

US6634370B2Oct 21, 2003

Liquid treatment system and liquid treatment method

TOKYO ELECTRON LTD6 citations60

TEL SAGAMI LTD

1 patent

US5048164ASep 17, 1991

Vertical heat-treatment apparatus having boat transfer mechanism

TEL SAGAMI LTD87 citations92

ELECTROPLATING ENG

1 patent

US6736945B2May 18, 2004

Wafer plating apparatus

ELECTROPLATING ENG4 citations60