Inventor
KUSUDA TATSUFUMI
JP35 patents
⚠️ This page may combine multiple inventors who share the name “KUSUDA TATSUFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
20 patentsUS7062161B2Jun 13, 2006
Photoirradiation thermal processing apparatus and thermal processing susceptor employed therefor
DAINIPPON SCREEN MFG476 citations99
US6843202B2Jan 18, 2005
Thermal processing apparatus for substrate employing photoirradiation
DAINIPPON SCREEN MFG397 citations99
US6998580B2Feb 14, 2006
Thermal processing apparatus and thermal processing method
DAINIPPON SCREEN MFG60 citations94
US8050546B2Nov 1, 2011
Heat treatment apparatus heating substrate by irradiation with light
DAINIPPON SCREEN MFG14 citations92
US7255899B2Aug 14, 2007
Heat treatment apparatus and heat treatment method of substrate
DAINIPPON SCREEN MFG28 citations92
US6859616B2Feb 22, 2005
Apparatus for and method of heat treatment by light irradiation
DAINIPPON SCREEN MFG38 citations92
US5568252AOct 22, 1996
Method and apparatus for measuring insulation film thickness of semiconductor wafer
DAINIPPON SCREEN MFG30 citations91
US7381928B2Jun 3, 2008
Thermal processing apparatus and thermal processing method
DAINIPPON SCREEN MFG21 citations90
US6885815B2Apr 26, 2005
Thermal processing apparatus performing irradiating a substrate with light
DAINIPPON SCREEN MFG37 citations87
US9180550B2Nov 10, 2015
Heat treatment apparatus for heating substrate by light irradiation
DAINIPPON SCREEN MFG13 citations84
US7935913B2May 3, 2011
Apparatus and method for thermal processing of substrate
DAINIPPON SCREEN MFG10 citations84
US7327947B2Feb 5, 2008
Heat treating apparatus and method
DAINIPPON SCREEN MFG13 citations84
US7230709B2Jun 12, 2007
Measuring method and measuring apparatus of optical energy absorption ratio, and thermal processing apparatus
DAINIPPON SCREEN MFG10 citations84
US7091453B2Aug 15, 2006
Heat treatment apparatus by means of light irradiation
DAINIPPON SCREEN MFG18 citations84
US7072579B2Jul 4, 2006
Light irradiation type thermal processing apparatus and method of adjusting light irradiation intensity
DAINIPPON SCREEN MFG16 citations84
US5635410AJun 3, 1997
Bias temperature treatment method
DAINIPPON SCREEN MFG13 citations74
US4723068AFeb 2, 1988
Electric power control device in an automatic temperature adjusting apparatus
DAINIPPON SCREEN MFG12 citations74
US6037781AMar 14, 2000
Measurement of electrical characteristics of semiconductor wafer
DAINIPPON SCREEN MFG12 citations73
US6856762B2Feb 15, 2005
Light irradiation type thermal processing apparatus
DAINIPPON SCREEN MFG6 citations61
US7531771B2May 12, 2009
Heat treatment apparatus of light emission type
DAINIPPON SCREEN MFG1 citations52
KUSUDA TATSUFUMI
6 patentsUS8781309B2Jul 15, 2014
Heat treatment apparatus heating substrate by irradiation with light
KUSUDA TATSUFUMI4 citations84
US8447177B2May 21, 2013
Heat treatment apparatus heating substrate by irradiation with light
KUSUDA TATSUFUMI10 citations84
US8295691B2Oct 23, 2012
Heat treatment apparatus
KUSUDA TATSUFUMI15 citations84
US8624165B2Jan 7, 2014
Heat treatment apparatus for heating substrate by irradiating substrate with flashes of light
KUSUDA TATSUFUMI12 citations79
US8891948B2Nov 18, 2014
Heat treatment apparatus and heat treatment method for heating substrate by irradiating substrate with flashes of light
KUSUDA TATSUFUMI2 citations62
US8229290B2Jul 24, 2012
Heat treatment apparatus and method for heating substrate by irradiation thereof with light
KUSUDA TATSUFUMI4 citations62
NIDEC READ CORP
5 patentsUS11953562B2Apr 9, 2024
MI sensor and method for manufacturing MI sensor
NIDEC READ CORP0 citations62
US11830670B2Nov 28, 2023
Coiled electronic component
NIDEC READ CORP0 citations62
US11527341B2Dec 13, 2022
Coiled electronic component, coil component, manufacturing method of coil component, inductance element, T-type filter, oscillation circuit, and manufacturing method of inductance
NIDEC READ CORP0 citations62
US12055615B2Aug 6, 2024
Detection value correction system, coefficient calculation method, and detection value correction method
NIDEC READ CORP0 citations52
US10760895B2Sep 1, 2020
Length measurement device
NIDEC READ CORP0 citations42
HASHIMOTO KAZUYUKI
2 patentsUS9920993B2Mar 20, 2018
Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
HASHIMOTO KAZUYUKI4 citations72
US8901460B2Dec 2, 2014
Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
HASHIMOTO KAZUYUKI6 citations72