Inventor
CHENG TUNG-GAN
TW3 patents
Patents
3 patentsUS6541787B2Apr 1, 2003
Optically aligning a loadport on a process machine by transmitting light through a system of apertures
TAIWAN SEMICONDUCTOR MFG7 citations65
US6526640B1Mar 4, 2003
Tool for installing seal ring
TAIWAN SEMICONDUCTOR MFG2 citations54
US6732442B2May 11, 2004
Precise mechanism for load port adjustment
TAIWAN SEMICONDUCTOR MFG3 citations52