Inventor
FAHRENBACH PETER
DE7 patents
⚠️ This page may combine multiple inventors who share the name “FAHRENBACH PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PFEIFFER VACUUM GMBH
4 patentsUS6454525B2Sep 24, 2002
Turbomolecular pump
PFEIFFER VACUUM GMBH7 citations71
US7015609B2Mar 21, 2006
Machine with a high-speed rotor
PFEIFFER VACUUM GMBH4 citations59
US6699009B2Mar 2, 2004
Vacuum pump
PFEIFFER VACUUM GMBH4 citations59
US6540475B2Apr 1, 2003
Gas friction pump
PFEIFFER VACUUM GMBH0 citations50