Inventor
TOKUSHIGE KATSUHIKO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TOKUSHIGE KATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
5 patentsUS6939208B2Sep 6, 2005
Polishing apparatus
EBARA CORP42 citations95
US7040968B2May 9, 2006
Polishing apparatus
EBARA CORP28 citations92
US6667238B1Dec 23, 2003
Polishing method and apparatus
EBARA CORP15 citations91
US7207864B2Apr 24, 2007
Polishing apparatus
EBARA CORP4 citations62
US10500691B2Dec 10, 2019
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations51